Proceedings of SPIE - The International Society for Optical Engineering

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Subject: Carbon dioxide (CO2); Deep Reactive Ion Etching (DRIE); Gas absorption spectrum; MIR Spectroscopy; Portable spectrometer

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		Issue Date	Title	Author(s)
	1	2017	Environmental mid-infrared gas sensing using MEMS FTIR spectrometer	Erfan, M.; Elsayed, A.A.; Sabry, Y.M.; Mortada, B.; Khalil, Diaa ; Sharaf K.