Optical MEMS parallel spectrometer

Abstract

This thesis aims to study and develop MEMS based parallel spectrometers to enhance signal to noise ratio or spectral resolution. For this purpose, we developed a new method for modelling the output field from multi-mode fiber. MEMS based Michelson interferometer, excited by multi-mode fiber, was modelled to study the single spectrometer specifications and predict the parallel spectrometer performance. Two different designs for the parallel spectrometers based on Deep-Reactive-Ion-Etching (DRIE) technology over Silicon-On-Insulator (SOI) wafer were proposed and implemented. Successful demonstration of the parallel spectrometers, based on the proposed designs, was realized. The proposed MEMS parallel spectrometers has either the advantage of ultra-high signal to noise ratio or high resolving power compared to the conventional architecture.