MEMS Fabry-Perot Spectrometer

Abstract

This thesis aims to study and develop MEMS spectrometers based on Fabry-Perot (FP) interferometers and electrostatic actuators. For this purpose, we developed high speed electrostatic actuators and compared between different architectures. A novel Fourier Transform InfraRed (FT-IR) spectrometer architecture based on cascaded FP interferometers was introduced and analyzed thoroughly. Two designs for the cas-caded FP FT-IR spectrometers based on Deep-Reactive-Ion-Etching (DRIE) technol-ogy over Silicon-On-Insulator (SOI) wafer were proposed and implemented. Success-ful demonstration of the spectrometer based the proposed designs was realized. The proposed MEMS spectrometer has the advantage of ultra-compact optics and high resolving power compared to the conventional architecture.