PLASMA DEPOSITION USING COAXIAL DISCHARGE
MOHAMMED ABD AL-MONAME MOHAMMED;
Abstract
n the present work, a plasma coaxial discharge system has been used with a new method for studying the deposition applications using different materials include gas, liquid, and different powders, to get a thin film. The new in the present study is that the depositing material has been placed at the breach.
The discharge current and voltage were measured. The first peak current reached 18 kA after 11 J.lS at 6 kV capacitor bank charging voltage. The deposited energy was 0.36 kJ/pulse at 6 kV charging voltage for air at
0.2 Torr pressure while the maximum peak power achieved was 40 MW.
The electron temperature and plasma density which has been measured by using double electric probe were found to be 12 eV and
1.7 x 1015 ion/cm3 , respectively at 6 kV charging voltage for air at 2 Torr
pressure. While the electron temperature which has been measured by spectroscopic techniques was found to be 17.7 eV for air and about
0.8 eV for butane gas.
The plasma sheath velocity measured by magnetic probe has been found in the order of 106 cm/s , while that the double electric probe measurements has shown that some portion of the plasma has been created at higher position in front of the breach.
The discharge current and voltage were measured. The first peak current reached 18 kA after 11 J.lS at 6 kV capacitor bank charging voltage. The deposited energy was 0.36 kJ/pulse at 6 kV charging voltage for air at
0.2 Torr pressure while the maximum peak power achieved was 40 MW.
The electron temperature and plasma density which has been measured by using double electric probe were found to be 12 eV and
1.7 x 1015 ion/cm3 , respectively at 6 kV charging voltage for air at 2 Torr
pressure. While the electron temperature which has been measured by spectroscopic techniques was found to be 17.7 eV for air and about
0.8 eV for butane gas.
The plasma sheath velocity measured by magnetic probe has been found in the order of 106 cm/s , while that the double electric probe measurements has shown that some portion of the plasma has been created at higher position in front of the breach.
Other data
| Title | PLASMA DEPOSITION USING COAXIAL DISCHARGE | Other Titles | الترسيب بالبلازما باستخدام التفريغ المحورى | Authors | MOHAMMED ABD AL-MONAME MOHAMMED | Issue Date | 2005 |
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