Investigation of Atomic Force Microscope as a Metrology Instrument

Abstract

Atomic Force Microscope ( AFM ) is one of instruments family called Scanning Probe Microscopes, which studying the sample properties such as electrical, magnetic, chemical, mechanical, optical, thermal properties and surface topography of materials by means of a physical probe . Atomic Force Microscope can perform measurements in a range of a few tens of micrometres, with sub-nanometre lateral and vertical resolutions. So, it is widely used in researches as well as industrial fields. All measurements that are performed using AFM are related in somehow to the length unit. To obtain accuracy and confidence in dimensional measurements, measurement results should be traceable to the definition of length standard. Metrological Atomic Force Microscope (MAFM) gives the measurements traceability to the definition of length is used. However, it is very complicated and expensive instrument.