High-throughput deeply-etched scanning Michelson interferometer on-chip

Mortada, B.; Sabry, Y.M.; Nagy M.; khaled, Hassan; Saadany B.; Bourouina T.; Khalil, Diaa;

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Title High-throughput deeply-etched scanning Michelson interferometer on-chip
Authors Mortada, B.; Sabry, Y.M.; Nagy M. ; khaled, Hassan ; Saadany B. ; Bourouina T. ; Khalil, Diaa 
Issue Date 2014
Journal International Conference on Optical MEMS and Nanophotonics
DOI 10.1109/OMN.2014.6924572
Scopus ID 2-s2.0-84908052822

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