On-Chip Micro-Electro-Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing

Erfan, M.; Sabry, Y.M.; Sakr, M.; Mortada, B.; Medhat, M.; Khalil, Diaa;

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Title On-Chip Micro-Electro-Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing
Authors Erfan, M.; Sabry, Y.M.; Sakr, M.; Mortada, B.; Medhat, M.; Khalil, Diaa 
Issue Date 2016
Journal Applied Spectroscopy
DOI 10.1177/0003702816638295
Scopus ID 2-s2.0-84967110036

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