Mid infrared MEMS FTIR spectrometer

Erfan, M.; Sabry, Y.M.; Mortada, B.; Sharaf K.; Khalil, Diaa;

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Title Mid infrared MEMS FTIR spectrometer
Authors Erfan, M.; Sabry, Y.M.; Mortada, B.; Sharaf K. ; Khalil, Diaa 
Issue Date 2016
Journal Proceedings of SPIE - The International Society for Optical Engineering
DOI 10.1117/12.2210973
Scopus ID 2-s2.0-84987670094

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