Modeling mask scattered field at oblique incidence
Tawfik, T.M.; Morshed, A.H.; Khalil, Diaa;
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| Title | Modeling mask scattered field at oblique incidence | Authors | Tawfik, T.M.; Morshed, A.H.; Khalil, Diaa | Issue Date | 2009 | Journal | Proceedings of SPIE - The International Society for Optical Engineering | DOI | 10.1117/12.814018 | Scopus ID | 2-s2.0-65849122658 |
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