On-Chip Parallel Architecture Mems FTIR Spectrometers Enabling High Spectral Resolution for Environmental Gas Analysis
Fathy, A.; Sabry, Y.M.; Bourouina T.; Khalil, Diaa;
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| Title | On-Chip Parallel Architecture Mems FTIR Spectrometers Enabling High Spectral Resolution for Environmental Gas Analysis | Authors | Fathy, A.; Sabry, Y.M.; Bourouina T. ; Khalil, Diaa | Issue Date | 2019 | Journal | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII | DOI | 10.1109/TRANSDUCERS.2019.8808185 | Scopus ID | 2-s2.0-85071955195 |
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