Deeply-etched MEMS slotted micromirrors with controlled transmittance
Othman, M.A.; Sabry, Y.M.; Nassar, I.M.; Sadek, M. F.; Khalil, Diaa;
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| Title | Deeply-etched MEMS slotted micromirrors with controlled transmittance | Authors | Othman, M.A.; Sabry, Y.M.; Nassar, I.M.; Sadek, M. F. ; Khalil, Diaa | Keywords | Optical MEMS;gaussian beam;overlap integral;parallel-plate waveguide;micro-optical bench;combdrive actuator;SOI technology;metallized mirrors;TRANSMISSION;LIGHT;SLIT | Issue Date | 2017 | Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | Journal | IEEE Journal of Quantum Electronics | ISSN | 0018-9197 | DOI | 10.1109/JQE.2017.2752702 | Scopus ID | 2-s2.0-85030233431 | Web of science ID | WOS:000413137500001 |
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