MEMS optical tunable filter based on free-standing subwavelength silicon layers
Omran, H.; Shalaby, M.Y.; Khalil D; Sabry, Y.M.; Sadek, M. F.;
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| Title | MEMS optical tunable filter based on free-standing subwavelength silicon layers | Authors | Omran, H.; Shalaby, M.Y.; Khalil D ; Sabry, Y.M.; Sadek, M. F. | Issue Date | 2014 | Journal | Proceedings of SPIE - The International Society for Optical Engineering | DOI | 10.1117/12.2040767 | Scopus ID | 2-s2.0-84900803549 |
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