Numerical estimation of dispersion effect in deeply-etched fully integrated MEMS Mach-Zhender interferometer
Omran, H.; Mortada, B.; Khalil, Diaa;
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Title | Numerical estimation of dispersion effect in deeply-etched fully integrated MEMS Mach-Zhender interferometer | Authors | Omran, H.; Mortada, B.; Khalil, Diaa | Issue Date | 2017 | Journal | 22nd Microoptics Conference, MOC 2017 | DOI | 10.23919/MOC.2017.8244594 | Scopus ID | 2-s2.0-85045959438 |
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