A MEMS disk resonator-based oscillator
El Khouly, Moustafa M.; Nada, Yasseen; Hegazi, Emad; Ragai, Hani F.; Ghannam, Moustafa Y.;
Abstract
A fully integrated MEMS based oscillator using a MEMS disk resonator is presented. Parameter extraction for a circuit model of the disk resonator using ANSYS is carried out at 60.6 MHz. A PIERCE oscillator using the disk resonator is designed. The circuit simulations are presented. The different specs of the oscillator like frequency, phase noise and frequency stability are investigated. The effect of the presence of the disk resonator on the performance of the oscillator is demonstrated. © 2006 IEEE.
Other data
| Title | A MEMS disk resonator-based oscillator | Authors | El Khouly, Moustafa M.; Nada, Yasseen; Hegazi, Emad ; Ragai, Hani F.; Ghannam, Moustafa Y. | Keywords | Disk resonator | Frequency stability | MEMS | Phase noise | Pierce oscillator | Issue Date | 1-Dec-2006 | Journal | Proceedings of the International Conference on Microelectronics, ICM | ISBN | 1424407656 | DOI | 10.1109/ICM.2006.373270 | Scopus ID | 2-s2.0-46749087902 |
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