Silicon based integrated hollow waveguide for gas sensing applications
Fathy, A.; Sabry, Y.M.; Khalil D; Marty F.; Bourouina T.;
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| Title | Silicon based integrated hollow waveguide for gas sensing applications | Authors | Fathy, A.; Sabry, Y.M.; Khalil D ; Marty F.; Bourouina T. | Keywords | Hollow waveguide; gas sensing; silicon; DRIE | Issue Date | 2020 | Publisher | SPIE-INT SOC OPTICAL ENGINEERING | Journal | Proceedings of SPIE - The International Society for Optical Engineering | ISSN | 1996756X 0277786X | DOI | 10.1117/12.2554947 | Scopus ID | 2-s2.0-85085192568 | Web of science ID | WOS:000576761300019 |
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