MEMS-Based Non-invasive Spectrometer

Abstract

This thesis aims to study the development of miniaturized systems for measurement of Blood Alcohol Concentration (BAC) and Blood Glucose Concentration (BGC) non-invasively through the human skin, using a Fourier Transform Infrared (FTIR) spectrometer based on Micro-Electro-Mechanical Systems (MEMS) technology. The spectrometer is micro-fabricated on a single silicon chip with Michelson interferometer as its core engine. This solution promises low cost and high scalability which is suitable for wearable applications. However, the miniature size of the system limits the optical throughput. Different aspects related to the MEMS spectrometer configuration and the safety of its operation on the skin are investigated. This is followed by the design and implementation of the optical probe used for the non-invasive measurements. This includes the modeling of light transport to acquire diffuse reflectance spectroscopy (DRS) from the human skin for the optimization of the useful signals.