High Resolution MEMS Spectrometer

Abstract

This thesis aims at presenting a high resolution Micro-ElectroMechanical Systems (MEMS) spectrometer based on a Fourier Transform Infra-Red (FTIR) spectrometer cascaded by a Fabry Perot Interferometer (FPI). By doing so, this spectrometer architecture would benefit from the high resolution provided by the FPI and the wide band operation provided by the FTIR spectrometer. This system is analysed, and a DSP algorithm is developed to get the high resolution spectrum. The cascaded spectrometer is validated in the lab using a multi-mode based Extrinsic Fiber Fabry Perot Interferometer (EFFPI) cascaded by a MEMS based FTIR spectrometer. A model is also developed to study the performance of the multi-mode EFFPI. The experimental measurements showed an improvement of 4x in the spectral resolution when compared to the resolution of the FTIR spectrometer alone.