Force Feedback in MEMS Inertial Sensors A Thesis
Mohammad Adel Elbadry;
Abstract
This thesis presents analysis of the non-idealities in the feedback path of ġĢ Force-Feedback
MEMS inertial sensors as well as the circuit implementation of the reference voltage for the
feedback. A high-performance MEMS accelerometer sensing system is
MEMS inertial sensors as well as the circuit implementation of the reference voltage for the
feedback. A high-performance MEMS accelerometer sensing system is
Other data
| Title | Force Feedback in MEMS Inertial Sensors A Thesis | Authors | Mohammad Adel Elbadry | Keywords | Force Feedback in MEMS Inertial Sensors A Thesis | Issue Date | 2009 | Description | This thesis presents analysis of the non-idealities in the feedback path of ġĢ Force-Feedback MEMS inertial sensors as well as the circuit implementation of the reference voltage for the feedback. A high-performance MEMS accelerometer sensing system is |
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