Capacitance to Digital Converter For MEMS-Based Inertial Sensing Applications
Ahmed Safwat Mohamed ElMallah;
Abstract
Aaltonen, T. Speeti, M. Saukoski & K. Halonen. An interface for
a 300 /s capacitive 2-axis micro-gyroscope with pseudo-CT readout.
In Solid-State Circuits Conference - Digest of Technical Papers, 2009.
ISSCC 2009. IEEE International, pages 344–345,345a, 2009. Cited on
page 66.
[Aaltonen 10a] L. Aaltonen & K.A.I. Halonen. An analog drive loop for a capacitive
MEMS gyroscope. Analog Integrated Circuits and Signal Processing,
vol. 63, no. 3, pages 465–476, 2010. Cited on page 31.
[Aaltonen 10b] Lasse Aaltonen. Integrated Interface Electronics For Capacitive MEMS
Inertial Sensors. PhD thesis, Aalto University, 2010. Cited on pages
xi, xii, 10, 30, 45, 46, 64, 156, 157, 159, 162, and 191.
[Abo 99] Andrew M. Abo. Design for Reliability of Low-Voltage,
Switched-Capacity Circuits. PhD thesis, EECS Department, University
of California, Berkeley, 1999. Cited on page 115.
[Acar 04] Cenk Acar. Robust Micromachined Vibratory Gyroscopes. PhD thesis,
University of California, Irvine, 2004. Cited on page 17.
[ADI 11] ADI. ±450dps Precision Angular Rate Sensor. ADIS16136, vol. Rev.
A, 2011. Cited on pages 42 and 45.
[Ahmed 02] Ayman Ibrahim Refaat Ahmed. RF Frequency Synthesizers. Master’s
thesis, Ain Shams University, June 2002. Cited on page 225.
[Ahmed 10] I. Ahmed. Pipelined ADC Design and Enhancement Techniques.
Analog Circuits and Signal Processing. Springer, 2010. Cited on pages
84, 92, 95, and 105.
[Amini 06] Babak Amini. A Mixed Signal Low Noise Sigma-Delta Interface IC
for Integrated Sub-MicroGravity Capacitive SOI Accelerometers. PhD
thesis, Georgia Institute of Technology, 2006. Cited on pages xii, 8,
37, 172, 173, 182, and 184.
257
258 References
[Bao 05] Min-Hang Bao. Analysis and Design Principles of MEMS Devices.
a 300 /s capacitive 2-axis micro-gyroscope with pseudo-CT readout.
In Solid-State Circuits Conference - Digest of Technical Papers, 2009.
ISSCC 2009. IEEE International, pages 344–345,345a, 2009. Cited on
page 66.
[Aaltonen 10a] L. Aaltonen & K.A.I. Halonen. An analog drive loop for a capacitive
MEMS gyroscope. Analog Integrated Circuits and Signal Processing,
vol. 63, no. 3, pages 465–476, 2010. Cited on page 31.
[Aaltonen 10b] Lasse Aaltonen. Integrated Interface Electronics For Capacitive MEMS
Inertial Sensors. PhD thesis, Aalto University, 2010. Cited on pages
xi, xii, 10, 30, 45, 46, 64, 156, 157, 159, 162, and 191.
[Abo 99] Andrew M. Abo. Design for Reliability of Low-Voltage,
Switched-Capacity Circuits. PhD thesis, EECS Department, University
of California, Berkeley, 1999. Cited on page 115.
[Acar 04] Cenk Acar. Robust Micromachined Vibratory Gyroscopes. PhD thesis,
University of California, Irvine, 2004. Cited on page 17.
[ADI 11] ADI. ±450dps Precision Angular Rate Sensor. ADIS16136, vol. Rev.
A, 2011. Cited on pages 42 and 45.
[Ahmed 02] Ayman Ibrahim Refaat Ahmed. RF Frequency Synthesizers. Master’s
thesis, Ain Shams University, June 2002. Cited on page 225.
[Ahmed 10] I. Ahmed. Pipelined ADC Design and Enhancement Techniques.
Analog Circuits and Signal Processing. Springer, 2010. Cited on pages
84, 92, 95, and 105.
[Amini 06] Babak Amini. A Mixed Signal Low Noise Sigma-Delta Interface IC
for Integrated Sub-MicroGravity Capacitive SOI Accelerometers. PhD
thesis, Georgia Institute of Technology, 2006. Cited on pages xii, 8,
37, 172, 173, 182, and 184.
257
258 References
[Bao 05] Min-Hang Bao. Analysis and Design Principles of MEMS Devices.
Other data
| Title | Capacitance to Digital Converter For MEMS-Based Inertial Sensing Applications | Other Titles | محول رقمي لسعة الكثافة في تطبيقات استشعار القصور الذاتي المستخدمة لمنظم الكهروميكانيكية الميكرومترية ا | Authors | Ahmed Safwat Mohamed ElMallah | Issue Date | 2014 |
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