Optical MEMS Interferometer for Spectrometry Applications
Haitham Abd El Salam Ahmed Omran;
Abstract
A novel miniature Mach-Zehnder (MZ) interferometer is
proposed. The micro-machined MZ interferometer is fabricated on an
SOI wafer using Deep Reactive Ion Etching (DRIE) technology. The new
structure is based on the use of two Si/Air beam splitters, an
proposed. The micro-machined MZ interferometer is fabricated on an
SOI wafer using Deep Reactive Ion Etching (DRIE) technology. The new
structure is based on the use of two Si/Air beam splitters, an
Other data
| Title | Optical MEMS Interferometer for Spectrometry Applications | Other Titles | مقياس تداخل ضوئي كهروميكانيكي ميكرومتري لتطبيقات المطياف الضوئي | Authors | Haitham Abd El Salam Ahmed Omran | Keywords | Optical MEMS Interferometer for Spectrometry Applications | Issue Date | 2010 | Description | A novel miniature Mach-Zehnder (MZ) interferometer is proposed. The micro-machined MZ interferometer is fabricated on an SOI wafer using Deep Reactive Ion Etching (DRIE) technology. The new structure is based on the use of two Si/Air beam splitters, an |
Attached Files
| File | Size | Format | |
|---|---|---|---|
| 96085p779.pdf | 304.49 kB | Adobe PDF | View/Open |
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