Optical Lithography Enhancement Techniques for Microelectronics Fabrication

Tamer Mohamed Tawfik;

Abstract


In this thesis, we study the variation of the diffracted field from a small opening with the angle of incidence using the physical theory of diffraction. This allowed us to better understand, quantify, and model the induced effects of light diffraction fr


Other data

Title Optical Lithography Enhancement Techniques for Microelectronics Fabrication
Other Titles طرق تحسين النحت الضوئي وتصنيع الميكروإلكترونيات
Authors Tamer Mohamed Tawfik
Keywords Optical Lithography Enhancement Techniques for Microelectronics Fabrication
Issue Date 2009
Description 
In this thesis, we study the variation of the diffracted field from a small opening with the angle of incidence using the physical theory of diffraction. This allowed us to better understand, quantify, and model the induced effects of light diffraction fr

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