Optical Lithography Enhancement Techniques for Microelectronics Fabrication
Tamer Mohamed Tawfik;
Abstract
In this thesis, we study the variation of the diffracted field from a small opening with the angle of incidence using the physical theory of diffraction. This allowed us to better understand, quantify, and model the induced effects of light diffraction fr
Other data
Title | Optical Lithography Enhancement Techniques for Microelectronics Fabrication | Other Titles | طرق تحسين النحت الضوئي وتصنيع الميكروإلكترونيات | Authors | Tamer Mohamed Tawfik | Keywords | Optical Lithography Enhancement Techniques for Microelectronics Fabrication | Issue Date | 2009 | Description | In this thesis, we study the variation of the diffracted field from a small opening with the angle of incidence using the physical theory of diffraction. This allowed us to better understand, quantify, and model the induced effects of light diffraction fr |
Attached Files
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