SiC Based High Quality Micro-Electro-Mechanical Systems (MEMS)
Bichoy Waguih Azmy Bahr;
Abstract
In this thesis, SiC was presented as a potential material for MEMS
devices, owing to its superior mechanical and chemical characteristics.
Capacitive micro-machined ultrasonic transducers (CMUTs) have been
selected as a good example for MEMS devices th
devices, owing to its superior mechanical and chemical characteristics.
Capacitive micro-machined ultrasonic transducers (CMUTs) have been
selected as a good example for MEMS devices th
Other data
| Title | SiC Based High Quality Micro-Electro-Mechanical Systems (MEMS) | Other Titles | النظم الميكروكهروميكانيكية(MEMS) عالية الجودة بتكنولوجيا السليكون كاربيد (SiC) | Authors | Bichoy Waguih Azmy Bahr | Keywords | SiC Based High Quality Micro-Electro-Mechanical Systems (MEMS) | Issue Date | 2012 | Description | In this thesis, SiC was presented as a potential material for MEMS devices, owing to its superior mechanical and chemical characteristics. Capacitive micro-machined ultrasonic transducers (CMUTs) have been selected as a good example for MEMS devices th |
Attached Files
| File | Size | Format | |
|---|---|---|---|
| 111054p6352.pdf | 202.32 kB | Adobe PDF | View/Open |
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