Characterization of Porous Silicon- based Active and Passive Electronic Devices

Abstract

Because of the designable materials properties, compatibility with conventional Si fabrication and thin film processes, and unique physical and chemical properties, PS is a versatile material with potential in a number of different application areas. Optical and optoelectronic applications are based on the tunable optical properties of the porous layer, such as the index of refraction and layer thickness (solar cells, PDs, reflectors), and on the various luminescence phenomena linked to PS (LEDs). Firstly, Fabrication of PS layers (PSLs) was performed by photoelectrochemical etching (PECE) process on the front side of textured n+ p Si junctions. The formed porosity was determined