Kinetics of shift of individual interfaces in Ni/Si system during low temperature reactions
S.S. Shenouda; Molnar, G.; Langer, G.A.; Katona, G.L.; Kristály, F.; Beke, D.L.;
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| Title | Kinetics of shift of individual interfaces in Ni/Si system during low temperature reactions | Authors | S.S. Shenouda ; Molnar, G.; Langer, G.A.; Katona, G.L.; Kristály, F.; Beke, D.L. | Issue Date | 2015 | Journal | Microelectronic Engineering | Volume | 134 | Start page | 14 | End page | 21 | ISSN | 01679317 | DOI | 10.1016/j.mee.2015.01.006 |
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