Optimization and characterization of modified cold grid cathode penning ion source
Abdel Reheem, AM; El-Khabeary, H; Hesham El-Sayed; Mahmoud, SM;
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| Title | Optimization and characterization of modified cold grid cathode penning ion source | Authors | Abdel Reheem, AM; El-Khabeary, H; Hesham El-Sayed ; Mahmoud, SM | Issue Date | 2021 | Journal | Plasma Chemistry and Plasma Processing | Volume | 41 | Issue | 5 | Start page | 1535 | End page | 1546 |
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