Modeling of surface roughness in deeply etched photonic MEMS mirrors and filters
Ahmed Mostafa; Hassan El-Nashar; Diaa Khalil; Ahmed Samir; Haitham Omran; Yasser M. Sabry;
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| Title | Modeling of surface roughness in deeply etched photonic MEMS mirrors and filters | Authors | Ahmed Mostafa; Hassan El-Nashar ; Diaa Khalil; Ahmed Samir; Haitham Omran; Yasser M. Sabry | Issue Date | 2022 | Journal | Optical Engineering | Volume | 61 | Issue | 11 | Start page | 117105 |
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