Slotted Optical Micro-Structures

Abstract

Micro-optical Fabry-Pérot filters are essential components for many applications in both the sensor and telecommunications domains. They can be built using the MEMS technology, which allows mass production, low cost and simple integration with many other components on a single chip. Such filters can be built using dielectric Bragg mirrors with relatively limited bandwidth, where the mirrors are required to be horizontal and the input light is vertical to the wafer, however, this does not allow for the mirror / filter integration with other components on the wafer.