Highly efficient micromachined Bragg mirrors using advanced DRIE process
Saadany B.; Khalil, Diaa; Bourouina T.;
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| Title | Highly efficient micromachined Bragg mirrors using advanced DRIE process | Authors | Saadany B. ; Khalil, Diaa ; Bourouina T. | Issue Date | 2006 | Journal | Proceedings - The 2006 International Conference on MEMS, NANO and Smart Systems, ICMENS | DOI | 10.1109/ICMENS.2006.348215 | Scopus ID | 2-s2.0-46249084729 |
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