Multi-step etching of three-dimensional sub-millimeter curved silicon microstructures with in-plane principal axis
Sabry, Y.M.; Khalil, Diaa; Saadany B.; Bourouina T.;
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| Title | Multi-step etching of three-dimensional sub-millimeter curved silicon microstructures with in-plane principal axis | Authors | Sabry, Y.M.; Khalil, Diaa ; Saadany B. ; Bourouina T. | Issue Date | 2014 | Journal | Microelectronic Engineering | DOI | 10.1016/j.mee.2013.10.001 | Scopus ID | 2-s2.0-84887050271 |
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