MEMS tunable Michelson interferometer with robust beam splitting architecture

Omran, H.; Medhat, M.; Khalil D; Marty F.; Saadany B.; Bourouina T.;

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Title MEMS tunable Michelson interferometer with robust beam splitting architecture
Authors Omran, H.; Medhat, M.; Khalil D ; Marty F.; Saadany B.; Bourouina T.
Issue Date 2009
Journal 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 
DOI 10.1109/OMEMS.2009.5338601
Scopus ID 2-s2.0-71749111188

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