Parameter extraction of silicon photonic devices using optical coherence tomography
Shalaby, R.A.; Sabry, Y.M.; Khalil, Diaa;
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| Title | Parameter extraction of silicon photonic devices using optical coherence tomography | Authors | Shalaby, R.A.; Sabry, Y.M.; Khalil, Diaa | Keywords | Silicon photonics; Refractive index; Fast Fourier transformation; Ring resonators; Fabrication tolerance; Characterization techniques; Group refractive index | Issue Date | 2020 | Publisher | SPIE-INT SOC OPTICAL ENGINEERING | Journal | Proceedings of SPIE - The International Society for Optical Engineering | ISSN | 1996756X 0277786X | DOI | 10.1117/12.2554265 | Scopus ID | 2-s2.0-85087042750 | Web of science ID | WOS:000589999800019 |
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