D1. High frequency in-plane MEMS actuator
Eltagoury, Y.M.; Soliman, M.; Sabry, Y.M.; Khalil, Diaa; Sadek, M. F.;
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| Title | D1. High frequency in-plane MEMS actuator | Authors | Eltagoury, Y.M.; Soliman, M.; Sabry, Y.M.; Khalil, Diaa ; Sadek, M. F. | Issue Date | 2015 | Journal | National Radio Science Conference, NRSC, Proceedings | DOI | 10.1109/NRSC.2015.7117845 | Scopus ID | 2-s2.0-84940727920 |
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