Integrating optical wave simulation into microsystems CAD tools
Khalil, Diaa; Saadany B.;
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| Title | Integrating optical wave simulation into microsystems CAD tools | Authors | Khalil, Diaa ; Saadany B. | Issue Date | 2001 | Journal | Proceedings of SPIE - The International Society for Optical Engineering | DOI | 10.1117/12.425350 | Scopus ID | 2-s2.0-0034866950 |
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