Numerical estimation of dispersion effect in deeply-etched fully integrated MEMS Mach-Zhender interferometer

Omran, H.; Mortada, B.; Khalil, Diaa;

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Title Numerical estimation of dispersion effect in deeply-etched fully integrated MEMS Mach-Zhender interferometer
Authors Omran, H.; Mortada, B.; Khalil, Diaa 
Issue Date 2017
Journal 22nd Microoptics Conference, MOC 2017 
DOI 10.23919/MOC.2017.8244594
Scopus ID 2-s2.0-85045959438

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