Simple method for measuring dispersion and spectral absorption of Si wafers for use in MEMS applications
Nabil, M.; Khalil D;
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| Title | Simple method for measuring dispersion and spectral absorption of Si wafers for use in MEMS applications | Authors | Nabil, M.; Khalil D | Issue Date | 2011 | Journal | Saudi International Electronics, Communications and Photonics Conference 2011, SIECPC 2011 | DOI | 10.1109/SIECPC.2011.5876962 | Scopus ID | 2-s2.0-79959955222 |
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