Circular MEM resonator: Modeling second order effects on resonance frequency
Nada, Y. S.; Stoffels, S.; Tilmans, H. A.C.; Hegazi, Emad; Ragai, H. F.; Shaarawi, A. M.;
Abstract
This paper suggests an analytical model for the second order effects on the resonance frequency of circular MEM resonator vibrating at the 0th order mode of vibration (pure radial). This model takes into consideration second order effects is compared to FEM simulation to verify the analytical model. ©2008 IEEE.
Other data
| Title | Circular MEM resonator: Modeling second order effects on resonance frequency | Authors | Nada, Y. S.; Stoffels, S.; Tilmans, H. A.C.; Hegazi, Emad ; Ragai, H. F.; Shaarawi, A. M. | Issue Date | 18-Aug-2008 | Journal | EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems | ISBN | 9781424421282 | DOI | 10.1109/ESIME.2008.4525089 | Scopus ID | 2-s2.0-49249083313 |
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