In-plane optical beam collimation using a three-dimensional curved MEMS mirror
Sabry, Y.M.; Khalil D; Saadany B.; Bourouina T.;
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| Title | In-plane optical beam collimation using a three-dimensional curved MEMS mirror | Authors | Sabry, Y.M.; Khalil D ; Saadany B.; Bourouina T. | Keywords | curved micromirrors; three-dimensional fabrication; Gaussian beams; surface roughness; MICROLENS ARRAYS; SILICON; FABRICATION; LIGHT; DESIGN; CAVITY | Issue Date | 2017 | Publisher | MDPI AG | Journal | Micromachines | ISSN | 2072-666X | DOI | 10.3390/mi8050134 | Scopus ID | 2-s2.0-85019122991 | Web of science ID | WOS:000404117900002 |
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