In-plane comb-drive actuator with high frequency-displacement product for micro-optical bench applications
Eltagoury, Y.M.; Soliman, M.; Al-Otaibi, M.; Sabry, Y.M.; Khalil D; Sadek, M. F.;
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| Title | In-plane comb-drive actuator with high frequency-displacement product for micro-optical bench applications | Authors | Eltagoury, Y.M.; Soliman, M.; Al-Otaibi, M.; Sabry, Y.M.; Khalil D ; Sadek, M. F. | Issue Date | 2014 | Journal | International Conference on Optical MEMS and Nanophotonics | DOI | 10.1109/OMN.2014.6924568 | Scopus ID | 2-s2.0-84908046826 |
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