In-plane comb-drive actuator with high frequency-displacement product for micro-optical bench applications

Eltagoury, Y.M.; Soliman, M.; Al-Otaibi, M.; Sabry, Y.M.; Khalil D; Sadek, M. F.;

Other data

Title In-plane comb-drive actuator with high frequency-displacement product for micro-optical bench applications
Authors Eltagoury, Y.M.; Soliman, M.; Al-Otaibi, M.; Sabry, Y.M.; Khalil D ; Sadek, M. F.
Issue Date 2014
Journal International Conference on Optical MEMS and Nanophotonics 
DOI 10.1109/OMN.2014.6924568
Scopus ID 2-s2.0-84908046826

Recommend this item

Similar Items from Core Recommender Database

Google ScholarTM

Check

Citations 5 in scopus
views 23 in Shams Scholar


Items in Ain Shams Scholar are protected by copyright, with all rights reserved, unless otherwise indicated.