In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs
Elhady, A.; Mahmoud, M.A.E.; Khalil D;
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| Title | In-plane monolithic microscanner with two synchronized, self-aligned flat mirrors and compliant springs | Authors | Elhady, A.; Mahmoud, M.A.E.; Khalil D | Issue Date | 2016 | Journal | Journal of Micro/ Nanolithography, MEMS, and MOEMS | DOI | 10.1117/1.JMM.15.1.015501 | Scopus ID | 2-s2.0-84964319073 |
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