In-plane deeply-etched optical MEMS notch filter with high-speed tunability

Sabry, Y.M.; Eltagoury, Y.M.; Soliman, M.; Khalil D; Sadek, M. F.; Shebl A.;

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Title In-plane deeply-etched optical MEMS notch filter with high-speed tunability
Authors Sabry, Y.M.; Eltagoury, Y.M.; Soliman, M.; Khalil D ; Sadek, M. F.; Shebl A.
Issue Date 2015
Journal Journal of Optics (United Kingdom) 
DOI 10.1088/2040-8978/17/12/125703
Scopus ID 2-s2.0-84948388970

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