Characterization of digitally compensated, large displacement comb drive
Mahmoud, M.S.; Khalil D; El-Hagry, M.T.; Badr, M.A.;
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| Title | Characterization of digitally compensated, large displacement comb drive | Authors | Mahmoud, M.S.; Khalil D ; El-Hagry, M.T.; Badr, M.A. | Issue Date | 2003 | Journal | Proceedings of the International Conference on Microelectronics, ICM | DOI | 10.1109/ICM.2003.237833 | Scopus ID | 2-s2.0-84945251871 |
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