Long travel range thermal actuator for deeply etched MEMS components
Osama, A.; Sabry, Y.M.; Khalil D;
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| Title | Long travel range thermal actuator for deeply etched MEMS components | Authors | Osama, A.; Sabry, Y.M.; Khalil D | Issue Date | 2018 | Journal | National Radio Science Conference, NRSC, Proceedings | DOI | 10.1109/NRSC.2018.8354400 | Scopus ID | 2-s2.0-85047320939 |
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