Mid-Infrared Wavelength-Selective Absorbing Metasurfaces Based on Highly-doped Silicon Gratings

Matta, Kirollos Ernest; Sarkar, Sreyash; Elsayed, Ahmed; Marty, Frederic; Herve, Armande; Erfan, Mazen; Khalil, Diaa; Sabry, Yasser M.; Nefzaoui, Elyes; Bourouina, Tarik;

Abstract


We experimentally demonstrate wavelength-selective metasurfaces operating in the mid-infrared spectral range extending from 1000 to 25000 nm. Resonant peaks are observed in the 13000-17000 nm range. The metasurface consists of micrometer-scale one dimensional periodic gratings made of highly-doped silicon using conventional ultra-violet lithography, taking advantage of its plasmonic behavior in the infrared. Simulations results supports understanding the effects of key parameters including the doping concentration and the gratings period.


Other data

Title Mid-Infrared Wavelength-Selective Absorbing Metasurfaces Based on Highly-doped Silicon Gratings
Authors Matta, Kirollos Ernest; Sarkar, Sreyash; Elsayed, Ahmed; Marty, Frederic; Herve, Armande; Erfan, Mazen ; Khalil, Diaa; Sabry, Yasser M.; Nefzaoui, Elyes; Bourouina, Tarik
Keywords FTIR spectroscopy;highly-doped silicon;Mid-infrared metasurfaces;RCWA;silicon gratings;wavelength-selectivity
Issue Date 1-Jan-2024
Journal Proceedings of the International Conference on Microelectronics, ICM 
ISBN [9798350379396]
ISSN 23327014
DOI 10.1109/ICM63406.2024.10815816
Scopus ID 2-s2.0-85215997679

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